The Mitutoyo LCD Plan UV microscope objective lenses are optimized for brightfield observations and laser microscopy applications in the ultraviolet and visible spectrum with fluorite and synthetic quartz lens materials and UV/Visible anti-reflective coatings.  The LCD Plan UV Series objective lenses correct for chromatic aberration throughout the ultraviolet and visible spectrum, and are specially designed for LCDs with a glass cover.

Applications

• CNC Vision Measuring Machines equipped with microscope systems and covering with a wide range of requirements and specifications to reduce inspection labor costs while raising throughput, enable more accurate measurements, and improve the working environment by eliminating difficult tasks
• Non-contact visual CMMs for high inspection speed of microscopic detail,
• Microspectroscopes, to measure reflective optical characters in very small areas,
• Interferometers that use a single or pair of objective lens microscopes; Fizeau interferometer, Michaelson interferometer, Linnik interferometer, 
• Microscope-equipped lasers, used to peel off a semiconductor's passivation layer to enable probing and for laser processing repair of defects in semiconductor and masks

Typical Optical System for Laser Processing:

• Semiconductor sub-micron level inspection for Defect Analyzer (Prober Station) and detection of faint light emitted by leaks.

Features

• The Finescope 70 Microscope Series is an infinity-corrected optical system that uses both the 378- Series objective lens and the MT Series imaging lens (tube lens) to generate images with aberration correction performed independently on the objective lens and imaging lens. This allows these products to be used independently or as part of an expandable system, with the imaging lens set as needed for customer applications.
• Mitutoyo LCD Plan UV microscope objective lenses are optimized for brightfield observations and laser microscopy applications in the ultraviolet and visible spectrum. To maintain transmissivity into the ultraviolet region, the typical optical glass has been replaced with fluorite and synthetic quartz as lens materials, with an anti-reflective (AR) UV/Visible coating applied for maximum optical performance. 
• Ergonomic design and simple controls provide an ease of operation and user comfortability, 
• High transmittance in the UV spectrum,
• Long working distance, specially designed to correct for LCDs with 0.7mm thick cover glass.
• Higher magnification, and large numerical aperture for sub-micron resolution.  

Specifications

•  Optimized for 266nm UV and visible wavelengths.  

• Infinity corrected,
• When projecting a mask image onto a specimen with a microscope mounted YAG laser, the image will be scaled by the factor f/200 times with a f=200mm Mitutoyo MT Tube lens. And, since the focal length (f) in UV (λ= 266 nm) is slightly smaller than in visible (λ= 550 nm) (see Specifications), the working area with UV radiation is also reduced.  

Dimensions