The Mitutoyo Finescope 70 (FS70) microscopes (Mitutoyo PN 378-) provide an erect image with a maximum magnification of 4000x to facilitate accuracy to sub-micron levels for ultra-microscopic manufacturing technologies in today's industrial world. Combining Mitutoyo's optical technologies and precision measurement technologies, the Finescope FS70 microscopes can be integrated into systems and equipment for manufacturing, research and development, and product inspection. The Finescope FS70 product line was created for brightfield viewing, darkfield viewing, Differential Interference Contrast (DIC) and for polarized imaging. (The FS70L and FS70L4 do not support DIC observation.)
Brightfield observation is a simplest specimen illumination method for general microscopy. This method uses reflected light from the specimen, or as light is transmitted from below and observed from above. Specimen contrast due to attenuation of the transmitted light in dense or light absorbtive areas of the sample. The typical appearance of a bright-field microscopy image is either a reflected bright image on dark background, or as a dark (attenuated) sample image on a bright background field.
Dark field observation is excellent for observing scratches, dust, and uneven surfaces, particularly for specimens with low reflectivity. The image is created by illuminating the sample with light that will not be collected by the objective lens and thus will not form part of the image. This produces the classic appearance of a dark, almost black, background with bright objects on it.
Polarization filters are used to observe optical characteristics of minerals, plastics, and liquid crystals.
Differential Interference Contrast (DIC) method, also known as Nomarski interference contrast (NIC), offers excellent depth detection to enhance the contrast in unstained, transparent samples. This makes it ideal for observations of metals, crystals, semiconductors, thinfilm coatings, LCDs or any material with ultra-small scratches, steps, and uneven surfaces. . The DIC method works on the principle of interferometry to create an image with the target specimen seen shades from dark to light on a gray background field.
Applications
Very high quality compact microscope with addition of a simple microscope stand, illumination, turret, objective lens and eyepieces, each sold separately,
Ideal for a prober station for semiconductors,
Micron level inspections,
The FS70L and FS70L4 can be equipped with YAG Laser, however Careful selection of laser system is required due to possible performance issues, risk of system and component damage, and critical personnel safety issues.
Cut semiconductor circuits,
Repair liquid crystal substrates,
Remove protective films,
Trim organic thin films,
Cutting of IC wiring (Au, Al) and exposure of lower layer pattern
Photomask repair,
Marking and inscribing,
Trimming and patterning,
Spot annealing.
Features
High performance optical system originally developed for the best-selling Finescope 60 models and further enhanced to create the Finescope 70 (FS70) product line.
The FS70L supports three types of YAG laser wavelength ranges (1064nm, 532nm and 355nm), while the FS70L4 supports two types of wavelength ranges (532nm and 266nm) for a broad scope of laser applications.
Brightfield, Differential Interference Contrast (DIC) and polarized observations are optional with FS70Z and FS70. The FS70L and FS70L4 do not support the DIC method.
Inward revolver turret and the long working distance objectives for ease of operation.
Erect image optical system creates an image in the field of view which has the same orientation as the specimen.
Enlarged fine focus adjustment wheel with rubber-grip coarse adjustment knob for enhanced ergonomics and adjustment control.
Specifications
SKU Number
Model Number
Head Optics
Head Movement
Body
Focus Block
Fiberoptic Illumination Port
Main Unit Mass (kg)
MTYO 378-184-1
FS70
Brightfield
Fixed
50%/50%
Standard Focus
Left Side
6.1
MTYO 378-184-2
FS70-S
Brightfield
Fixed
50%/50%
Short Focus
Left Side
6.1
MTYO 378-184-3
FS70-TH
Brightfield
Tilting Ergonomic
0%/100% Observation/TV
Standard Focus
Left Side
7.1
MTYO 378-184-4
FS70-THS
Brightfield
Tilting Ergonomic
0%/100% Observation/TV
Short Focus
Left Side
7.1
MTYO 378-185-1
FS70Z
Brightfield with 1x-2x Variable Zoom Tube Lens
Fixed
50%/50% Observation/TV
Standard Focus
Top Side
6.6
MTYO 378-185-2
FS70Z-S
Brightfield with 1x-2x Variable Zoom Tube Lens
Fixed
50%/ 50% Observation/TV
Short Focus
Top Side
6.6
MTYO 378-185-3
FS70Z-TH
Brightfield with 1x-2x Variable Zoom Tube Lens
Tilting Ergonomic
0%/100% Observation/TV
Standard Focus
Top Side
7.5
MTYO 378-185-4
FS70Z-THS
Brightfield with 1x-2x Variable Zoom Tube Lens
Tilting Ergonomic
0%/100% Observation/TV
Short Focus
Top Side
7.5
MTYO 378-186-1
FS70L
1x NIR Tube Lens for Three YAG Laser Wavelengths: 1064nm, 532nm, 355nm
Fixed
Switchable Eyepiece-Laser Port:100/0 Or 0/100
Standard Focus
Left Side
6.1
MTYO 378-186-2
FS70L-S
1x NIR Tube Lens for Three YAG Laser Wavelengths: 1064nm, 532nm, 355nm
Fixed
Switchable Eyepiece-Laser Port:100/0 Or 0/100
Short Focus
Left Side
6.1
MTYO 378-186-3
FS70L-TH
1x NIR Tube Lens for Three YAG Laser Wavelengths: 1064nm, 532nm, 355nm
Tilting Ergonomic
Switchable Eyepiece-Laser Port:100/0 Or 0/100
Standard Focus
Left Side
7.1
MTYO 378-186-4
FS70L-THS
1x NIR Tube Lens for Three YAG Laser Wavelengths: 1064nm, 532nm, 355nm
Tilting Ergonomic
Switchable Eyepiece-Laser Port:100/0 Or 0/100
Short Focus
Left Side
7.1
MTYO 378-187-1
FS70L4
1x UV Tube Lens For 2 Laser Wavelengths: 532nm, 266nm
Fixed
Switchable Eyepiece-Laser Port:100/0 Or 0/100
Standard Focus
Left Side
6.6
MTYO 378-187-2
FS70L4-S
1x UV Tube Lens For 2 Laser Wavelengths: 532nm, 266nm
Fixed
Switchable Eyepiece-Laser Port:100/0 Or 0/100
Short Focus
Left Side
6.6
MTYO 378-187-3
FS70L4-TH
1x UV Tube Lens For 2 Laser Wavelengths: 532nm, 266nm
Tilting Ergonomic
Switchable Eyepiece-Laser Port:100/0 Or 0/100
Standard Focus
Left Side
7.5
MTYO 378-187-4
FS70L4-THS
1x UV Tube Lens For 2 Laser Wavelengths: 532nm, 266nm
Tilting Ergonomic
Switchable Eyepiece-Laser Port:100/0 Or 0/100
Short Focus
Left Side
7.5
All models CE marked,
Standard inward-revolver, Optional revolvers with the center adjustment and parfocal mechanisms are available,
Erect Image: Image orientation same as the specimen,
Ergonomic Tilt Head Angle: 0º - 20º (-T and -TH versions only),
YAG laser limitations (axial and non-polarized only):
Wavelength
10ns Pulse (J/cm2)
CW (kW/cm2)
FS70L
FS70L4
FS70L
FS70L4
1064 nm
0.094
NA
0.23
NA
532 nm
0.075
0.075
0.18
0.2
355 nm
0.018
NA
0.06
NA
266 nm
NA
0.015
NA
0.05
Careful selection of laser system is required due to possible performance issues, risk of system and component damage, and critical personnel safety issues.
Dimensions:
FS70 and FS70Z
FS70L
FS70L4
Tilting Head Dimensions
Fiberoptic Port Detail
Mounting Detail
Focus Mechanism:
Travel Range: 50mm
Fine Adjust: 0.1mm/rev.
Coarse Adjust: 3.8mm/rev.
Short focus units mount 68mm higher on microscope stand than the standard focus blocks:
20mm scale (Minimum reading: 0.1mm) with cross hair
10mm scale (Minimum reading: 0.1mm)
5mm scale (Minimum reading: 0.05mm)
Microscope Stand
Warranty Information
Manufacturer's Warranty: The manufacturer warrants its products to be free of detects in materials and workmanship for the stated period from date of original purchase invoice. All warranties or merchant ability and fitness for any purpose and all other warranties, expressed or implied, except those expressly set forth herein, are deemed waived and excluded. Manufacturer's duty under the warranty is limited to replacement and/or repair of the defective part at their exclusive option. Seller shall not be liable for any expenses or damages incurred by the purchaser except as expressly set forth herein, and in no event shall seller or manufacturer be liable for any special, incidental or consequential damages of any kind. This warranty does not supersede any statutory rights that may be available in certain countries. The foregoing manufacturer's warranty of shall be voided, and of no force and effect if buyer has modified or damaged the product.